Register for free to
view the full innovation profile.
This technology allows for selective heating of specific regions within micro or nano-scale devices.
About
Abstract Bulk heating of Microelectromechanical devices (MEMS) can produce undesired effects and even disable or destroy many devices. However the mechanical components of such devices can commonly benefit from some form of heat treatment. This technology allows for selective heating of specific regions within micro or nano-scale devices or other components embedded within thin films. This technology allows for the creation of devices that cannot otherwise be fabricated, or must be separately fabricated with individual components assembled after heat treating. Case Number: 200203.00 Status: Prototype Related Categories Electronics and semiconductors, Manufacturing processes, MEMS-micromanufacturing, Thermal systems-management.