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A low-cost, micro electromechanical system technology, sensor node packing multiple sensors that target multiple gases at different concentration levels in less than a 1 cm^2-chip.
About
Micro electromechanical system (MEMS) gas sensors are ideal solutions to implement versatile GHG sensor networks. They combine low cost, localized, and real-time measurement of GHG with the versatility to pack multiple sensors, target various gases at different concentration ranges, and deliver all that functionality within a small (less than 1 cm^2) chip. We have developed an ecosystem of cutting-edge MEMS gas sensor technologies and demonstrated detection of various volatile organic gases at concentration ranging from few ppm to tens of ppb. Building on this technology suite, we will develop portable sensor nodes to monitor GHG emissions and other airborne pollutants.
Key Benefits
Small size, light weight, low power, robust, customizable.
Applications
Sensors and instrumentation industry.